ACP - Multy Roots Pump

ACP - Multy Roots Pump

Multi stage roots pump from Pfeiffer Vacuum generates clean and dry vacuum for different applications and markets. Smaller ACP-roots pumps are often used as backing pumps for turbo pumps, bigger A120 is used in lyophilisation process and series A100, A3P and A3H are used in bigger quantities in semiconductor or solar industry.

 





Advantages:

  • Pumps from atmosphere
  • Dry pump, without particles
  • Replacement for oil or scroll pump
  • Frequency transformer to adjust the pumping speed to your application
  • Very long service interval (20.000h/22.000h for ACP 15/ACP 28 and ACP 40)
  • Possibility to pump water vapor up to 1000g/h

 

Applications:

  • Load-lock
  • Transport chambers
  • Sputtering
  • PVD
  • Metrology
  • Semiconductor and solar industry; doping, deposition, etching, termal processes (RTP), Chemical coating


Simulation

Brochure

Send inquiry

Oglasi:

JEOL
Pfeiffer vacuum
Oxford Instruments
RMC Products
CryopAL
SPI supplies
VAT AG
HSR AG